SEMI Standards Support Servic

MK Unisoft has extensive experience in implementing 200mm and 300mm standards. We offer the following SEMI standards support services:

SEMI E4SECS-I: SEMI Equipment Communications Standard 1 Message Transfer.
SEMI E5SECS-II SEMI Equipment Communications Standard 2 Message Content
SEMI E30GEM: Generic Model for Communication and Control of SEMI Equipment.
SEMI E37HSMS-SS: High Speed Message Service-Single Session.
SEMI E39Object Services Standard: Concepts, Behavior, and Services.
SEMI E40Standard for Processing Management.
SEMI E58ARAMS (Automated, Reliability, Availability, and Maintainability Standard).
SEMI E84Specification for Enhanced Carrier Handoff Parallel I/O Interface.
SEMI E87Specification for Carrier Management.
SEMI E90Specification for Substrate Tracking.
SEMI E94Specification for Control Job Management.
SEMI E95Specification for Human Interface for Semiconductor Manufacturing Equipment.
SEMI E99Carrier ID Reader/Writer Functional Standard.
SEMI E116Equipment Performance Tracking.
SEMI E127Specification for Integrated measurement module communication.
Interface ASEMI Standards E120, E125, E132, and E134.

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Services Offered

Semiconductor Technology
Information Technology

Semiconductor Technology

Automated Wafer Inspection
Integrated Wafer Inspection
Automated Wafer Metrology
Yield Management
Equipment Automation
Automation Testing
MES Integration

Equipment Automation

SEMI Standards Support
Automation Software
E-84 Compliance Testing
FAB Experience
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2020-09-23 - Wed